Semiconductor Device Fabrication Technology Detailed Syllabus form Gauhati University
Semiconductor Device Fabrication Technology , 2nd semester. MSc Electronics Detailed Syllabus under Gauhati University A) Semiconductor Device Fabrication Technology (30marks) Unit-1 Thin Film: Basic definitions- thin and thick films, properties of thin films, thin film deposition methods- PVD, CVD, Epitaxy theory of nucleation and growth in thin films; VPE, LPE, MOCVD, MBE techniques Growth of multilayer structure, defects; diffusion, method of control and measurement of film thickness, structure, optical, electrical and mechanical characterization of thin films metallic, semi conducting and insulating films; non crystalline films; various applications of thin films. ( 10 marks ) Unit-2 IC Processing: Introduction to I.C s – Definition, scale of integration, types-monolithic, hybrid, thick & thin films; capacitance & resistance formation in ICs , idea of fabrication (si...